国際活動

2021年6月11日

  • 国際会議
  • 学会発表

8th International Workshop on Piezoelectric MEMS (virtual conference)

-June 2021, virtual conference-

■Investigation of electromechanical characteristics of 2-degree-of-freedom MEMS piezoelectric vibration energy harvester under impulsive force　　　S. Aphayvong
■Investigation of the growth mechanism of BiFeO3 films on sputtering method　　R. Kikuchi
■Electrical properties of organic piezoelectric P(VDF-TrFE) films fabricated by various solvent　　K. Hiratsuka
■Characteristics of Al1-xScxN epitaxial thin film on Si substrate by changing nitrogen partial pressure　　K. Miyaji