国際活動

2020年7月29日

  • 国際会議
  • 学会発表

IEEE IFCS-ISAF 2020 (virtual conference)

-July 2020, Colorado, USA-

■Observation of Domain Structure of P(VDF-TrFE) Films Using Direct Piezoelectric Response Microscopy   T. Yoshimura
■Formation Process of Metastable Phases of Al-Doped HfO2 Films Directly on Si by Atomic Layer Deposition　　　　S. Takarae
■Investigation of the Growth Mechanism of PZT Films Using Combinatorial Sputtering Method　　　M. Murase
■Electromechanical Properties of MEMS Piezoelectric Vibration Energy Harvester for Impulse Vibration　　　S. Aphayvong