Gallery (Equipment)

　Japanese

Experimental equipment of the laboratory

Dual-beam fabrication & observation machine (FIB-SEM) *providing as a shared machine

Hybrid thin film deposition machine (Electron beam evaporator, RF sputtering, Ar-beam ion gun, Joule heating evaporator, load lock)

MBE machine (K cell, E-beam evaporator, RHEED, load lock)

Liq.He flow prober with 4 arms (X-Y magnetic fields)

Vector network analyzer (40 GHz)

Spectrum analyzer & Signal generator (40 GHz)

Oscilloscope

Fast pulse generator

Wedge wire bonder

TEM holders (Electric signal application, Temperature cooling, inert atomosphere etc.)

Vacuum system

PPMS holders

etc.

Shared facilities/machines (Nakamozu campus, OMU)

High-standard Clean Room (CR)

High Accuracy EB Lithography System

Focused Ion Beam Processing System (FIB: Hitachi FB-2100)

Scanning Electron Microscopes (SEM)

Helium liquefying unit/ He gas recycle sytem

Measurement System for Physical Properties (PPMS)

Magnetic Properties Measurement System (MPMS)

Transmission Electron Miroscopes (TEM: JEM-2100F, JEM-2010, JEM-2010M)

Laser Microscopes

etc.