Gallery (Equipment)

　Japanese

Experimental equipment of the laboratory


  • Dual-beam fabrication & observation machine (FIB-SEM) *providing as a shared machine

  • Hybrid thin film deposition machine (Electron beam evaporator, RF sputtering, Ar-beam ion gun, Joule heating evaporator, load lock)

  • MBE machine (K cell, E-beam evaporator, RHEED, load lock)

  • Liq.He flow prober with 4 arms (X-Y magnetic fields)

  • Vector network analyzer (40 GHz)

  • Spectrum analyzer & Signal generator (40 GHz)

  • Oscilloscope

  • Fast pulse generator

  • Wedge wire bonder

  • TEM holders (Electric signal application, Temperature cooling, inert atomosphere etc.)

  • Vacuum system

  • PPMS holders

    etc.

　English

Shared facilities/machines (Nakamozu campus, OMU)


  • High-standard Clean Room (CR)

  • High Accuracy EB Lithography System

  • Focused Ion Beam Processing System (FIB: Hitachi FB-2100)

  • Scanning Electron Microscopes (SEM)

  • Helium liquefying unit/ He gas recycle sytem

  • Measurement System for Physical Properties (PPMS)

  • Magnetic Properties Measurement System (MPMS)

  • Transmission Electron Miroscopes (TEM: JEM-2100F, JEM-2010, JEM-2010M)

  • Laser Microscopes

    etc.